Compact silicon photonics circuit to extract multiple parameters for process control monitoring

Xing, YufeiYufeiXingWang, MiMiWangRuocco, AlfonsoAlfonsoRuoccoGeessels, JorisJorisGeesselsKhan, Muhammad UmarMuhammad UmarKhanBogaerts, WimWimBogaerts2021-10-292021-10-292020-022578-7519https://imec-publications.be/handle/20.500.12860/36369Compact silicon photonics circuit to extract multiple parameters for process control monitoringJournal articlehttps://doi.org/10.1364/OSAC.383711