Croes, KristofKristofCroesMoon, Kwang JinKwang JinMoonCarbonell, LaureLaureCarbonellStruyf, HerbertHerbertStruyfHeylen, NancyNancyHeylenTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11924Electromigration study of ultra narrow copper lines in low-k dielectricOral presentation