Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Rawat, AmitaAmitaRawatBhuwalka, KrishnaKrishnaBhuwalkaMatagne, PhilippePhilippeMatagneVermeersch, BjornBjornVermeerschWu, HaoHaoWuHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaertLiu, ChangzeChangzeLiu2022-04-282022-04-082022-04-142022-04-2820211930-8833WOS:000766309500010https://imec-publications.be/handle/20.500.12860/39598Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process RisksProceedings paper10.1109/ESSCIRC53450.2021.9567879978-1-6654-3751-6WOS:000766309500010