Light-induced capacitance alteration for non-destructive open failure localization in 3-D TSV structures

Jacobs, Kristof J.P.Kristof J.P.JacobsKhaled, AhmadAhmadKhaledStucchi, MicheleMicheleStucchiWang, TengTengWangGonzalez, MarioMarioGonzalezCroes, KristofKristofCroesDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28577Light-induced capacitance alteration for non-destructive open failure localization in 3-D TSV structuresMeeting abstract