Formation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxation

Cheng, KaiKaiChengLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteBender, HugoHugoBenderFavia, PaolaPaolaFaviaBorghs, GustaafGustaafBorghsGermain, MarianneMarianneGermain2021-10-202021-10-2020120022-0248https://imec-publications.be/handle/20.500.12860/20449Formation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxationJournal article