Nano goes macro - Nanoimprint lithography at the transition from small to large-area production

Stadlober, BarabaraBarabaraStadloberNees, DieterDieterNeesLintschnig, AndreAndreLintschnigBelegratis, MariaMariaBelegratisGold, HerbertHerbertGoldHaase, AnjaAnjaHaaseFian, AlexanderAlexanderFianSchindler, AxelAxelSchindlerDrost, AndreasAndreasDrostKoenig, MartinMartinKoenigZanella, FredericFredericZanellaMarjanovic, NenadNenadMarjanovicRing, JohanJohanRingLee, Ki-DongKi-DongLeeMuller, RobertRobertMullerGenoe, JanJanGenoeHirshy, HassanHassanHirshyPretot, RogerRogerPretot2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23116Nano goes macro - Nanoimprint lithography at the transition from small to large-area productionOral presentation