Carrier illumination as a tool to probe implant dose and electrical activation

Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseBrijs, BertBertBrijsLoo, RogerRogerLooPeytier, IvanIvanPeytierPawlak, BartekBartekPawlakBudiarto, E.E.BudiartoBorden, P.P.Borden2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8323Carrier illumination as a tool to probe implant dose and electrical activationProceedings paper