Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffraction

Shida, KazukiKazukiShidaTakeuchi, ShotaroShotaroTakeuchiImai, YasuhikoYasuhikoImaiKimura, ShigeruShigeruKimuraSchulze, AndreasAndreasSchulzeCaymax, MattyMattyCaymaxSakai, AkiraAkiraSakai2021-10-242021-10-2420171944-8244https://imec-publications.be/handle/20.500.12860/29429Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffractionJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acsami.7b01309