Doise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanHong, Sung EunSung EunHongLin, GuanyangGuanyangLinGronheid, RoelRoelGronheid2021-10-232021-10-2320161932-5150https://imec-publications.be/handle/20.500.12860/26568Influence of template fill in graphoepitaxy directed self-assemblyJournal articlehttp://nanolithography.spiedigitallibrary.org/article.aspx?articleid=2545881