Trimming of silicon ring resonator by electron beam induced compaction and strain

Schrauwen, JonathanJonathanSchrauwenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-031094-4087https://imec-publications.be/handle/20.500.12860/14449Trimming of silicon ring resonator by electron beam induced compaction and strainJournal article