Heremans, PaulPaulHeremansKuijk, MaartenMaartenKuijkWindisch, ReinerReinerWindischVanderhaegen, JohanJohanVanderhaegenDe Neve, HansHansDe NeveVounckx, RogerRogerVounckxBorghs, GustaafGustaafBorghs2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1928Angular spectroscopic analysis: an optical characterization technique for laterally oxidized AlGaAs layersJournal article