Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH

Chung, Seung-MinSeung-MinChungKoike, JunichiJunichiKoikeTokei, ZsoltZsoltTokei2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13526Effects of plasma surface treatment on the self-forming barrier process in porous SiOCHProceedings paper