Process and properties of ALD tungsten nitride carbide barrier films for interconnects

Schuhmacher, JörgJörgSchuhmacherTravaly, YoussefYoussefTravalyBeyer, GeraldGeraldBeyerStokhof, MaartenMaartenStokhofSchaekers, MarcMarcSchaekersMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9575Process and properties of ALD tungsten nitride carbide barrier films for interconnectsProceedings paper