Torregiani, CristinaCristinaTorregianiVan Bockstael, CharlotteCharlotteVan BockstaelDetavernier, ChristopheChristopheDetavernierLavoie, ChristianChristianLavoieLauwers, AnneAnneLauwersKittl, JorgeJorgeKittl2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12984Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gatesJournal articlehttp://dx.doi.org/10.1016/j.mee.2007.05.054