Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning

Pasquali, MattiaMattiaPasqualiDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArminiIlliberi, AndreaAndreaIlliberiVerni, GiuseppeGiuseppeVerniDeng, ShaorenShaorenDengGivens, MichaelMichaelGivens2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31494Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterningMeeting abstracthttps://www.asd2019-workshop.org/index.php/presentation-download/abstract-book