Nanoporous Silica-Alumina Films Fabricated on Silicon Photonic Chips for Selective Ammonia Sensing

Li, YanluYanluLiBellani, ClaudioClaudioBellaniYebo, NebiyuNebiyuYeboDendooven, JolienJolienDendoovenSeo, Jin WonJin WonSeoDetavernier, ChristopheChristopheDetavernierBaets, RoelRoelBaetsMartens, Johan A.Johan A.MartensSree, Sreeprasanth PulinthanathuSreeprasanth PulinthanathuSree2023-05-042022-11-152023-05-0420222574-0970WOS:000879361400001https://imec-publications.be/handle/20.500.12860/40737Nanoporous Silica-Alumina Films Fabricated on Silicon Photonic Chips for Selective Ammonia SensingJournal article10.1021/acsanm.2c02741WOS:000879361400001THIN-FILMSGAS-DETECTIONSENSORSCOMPOSITESABSORPTIONRESONATORLAYER