The small-gap technique: understanding an ion-shading method for plasma-surface interactions study

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeJarnac, AmelieAmelieJarnacConard, ThierryThierryConardHendrickx, DirkDirkHendrickxHuffman, CraigCraigHuffmanKunnen, EddyEddyKunnenLazzarino, FredericFredericLazzarinoMilenin, AlexeyAlexeyMileninShamiryan, DenisDenisShamiryanStruyf, HerbertHerbertStruyfVandervorst, AlainAlainVandervorstUrbanowicz, AdamAdamUrbanowiczBoullart, WernerWernerBoullart2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16951The small-gap technique: understanding an ion-shading method for plasma-surface interactions studyMeeting abstracthttp://imec-events.be/UserFiles/76/File/Presentations/S3/S3_PESM2010_JFdM.pdf