Mangal, NiveshNiveshMangalMissinne, JeroenJeroenMissinneRoelkens, GuntherGuntherRoelkensVan Campenhout, JorisJorisVan CampenhoutVan Steenberge, GeertGeertVan SteenbergeSnyder, BradBradSnyder2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31277Expanded-beam through-substrate coupling interface for alignment tolerant packaging of silicon photonicsProceedings paperhttps://ieeexplore.ieee.org/document/8385874