Alignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlenses

Missinne, JeroenJeroenMissinneTeigell Beneitez, NuriaNuriaTeigell BeneitezMangal, NiveshNiveshMangalZhang, J.J.ZhangVasiliev, AntonAntonVasilievVan Campenhout, JorisJorisVan CampenhoutSnyder, BradBradSnyderRoelkens, GuntherGuntherRoelkensVan Steenberge, GeertGeertVan Steenberge2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33597Alignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlensesProceedings paperhttps://doi.org/10.1117/12.2506159