Rochus, VeroniqueVeroniqueRochusGutschmidt, StefanieStefanieGutschmidtCardona, AlbertoAlbertoCardonaGeuzaine, ChristopheChristopheGeuzaine2021-10-202021-10-2020120018-9464https://imec-publications.be/handle/20.500.12860/21402Electro-mechano-fluidic modelling of microsystems using finite elementsJournal article