Area-selective deposition of low-k materials by means of the sol-gel method

Redzheb, MuradMuradRedzhebPasquali, MattiaMattiaPasqualiArmini, SilviaSilviaArmini2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31647Area-selective deposition of low-k materials by means of the sol-gel methodMeeting abstracthttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf