Jovanovic, VladimirFaculty of ElectricalVladimirFaculty of ElectricalJovanovicPoljak, MirkoMirkoPoljakSuligoj, TomislavTomislavSuligojCivale, YannYannCivaleNanver, LisLisNanver2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/155531.9 nm wide ultra-high aspect-ratio bulk-Si FinFETsProceedings paper