Masaoka, ToruToruMasaokaGan, NobukoNobukoGanFujimura, YuYuFujimuraOgawa, YuichiYuichiOgawaWostyn, KurtKurtWostynPacco, AntoineAntoinePaccoYoshida, YukifuniYukifuniYoshidaHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26976Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial processProceedings paperhttp://www.scientific.net/SSP.255.27