Impact of different dopants on the switching properties of ferroelectric hafnium oxide

Schroeder, UweUweSchroederYurchuk, EkaterinaEkaterinaYurchukMüller, JohannesJohannesMüllerMartin, DominikDominikMartinSchenk, TonyTonySchenkPolakowski, P.P.PolakowskiAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciKalinin, S.S.KalininMikolajick, ThomasThomasMikolajick2021-10-222021-10-222014-070021-4922https://imec-publications.be/handle/20.500.12860/24500Impact of different dopants on the switching properties of ferroelectric hafnium oxideJournal articlehttp://dx.doi.org/10.7567/JJAP.53.08LE02