Silicon-rich oxides as an alternative charge-trapping medium in Fowler-Nordheim and hot-carrier type non-volatile-memory cells

Rosmeulen, MaartenMaartenRosmeulenSleeckx, ErikErikSleeckxDe Meyer, KristinKristinDe Meyer2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6772Silicon-rich oxides as an alternative charge-trapping medium in Fowler-Nordheim and hot-carrier type non-volatile-memory cellsProceedings paper