Origin of degradation in Si-based all-solid-state Li-ion microbatteries

Chen, ChunguangChunguangChenOudenhoven, JosJosOudenhovenDanilov, DmitriDmitriDanilovVezhlev, EgorEgorVezhlevGao, LuLuGaoLi, NaNaLiMulder, FokkoFokkoMulderEichel, Rüdiger-A.Rüdiger-A.EichelNotten, PeterPeterNotten2021-10-252021-10-2520181614-6840https://imec-publications.be/handle/20.500.12860/30398Origin of degradation in Si-based all-solid-state Li-ion microbatteriesJournal articlehttps://doi.org/10.1002/aenm.201801430