Vanhellemont, JanJanVanhellemontChen, J.J.ChenXu, W.W.XuYang, D.D.YangRafi, J.M.J.M.RafiOhyama, H.H.OhyamaSimoen, EddyEddySimoen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18238Germanium doping of Si substrates for improved device characteristics and yieldProceedings paper