Zero-energy SIMS: The role of surface roughness development with XeF2 based etching

Vanhove, NicoNicoVanhoveLievens, PeterPeterLievensVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16444Zero-energy SIMS: The role of surface roughness development with XeF2 based etchingOral presentation