EDA solutions to new-defect detection in advanced process technologies

Marinissen, Erik JanErik JanMarinissenVandling, GilbertGilbertVandlingGoel, SandeepSandeepGoelHapke, FriedrichFriedrichHapkeRivers, JasonJasonRiversMittermaier, NikolausNikolausMittermaierBahl, SwapnilSwapnilBahl2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21106EDA solutions to new-defect detection in advanced process technologiesProceedings paper