Kunnen, EddyEddyKunnenBaklanov, MikhaïlMikhaïlBaklanovFranquet, AlexisAlexisFranquetShamiryan, DenisDenisShamiryanRakhimova, TatyanaTatyanaRakhimovaUrbanowicz, AdamAdamUrbanowiczStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullart2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/17407Effect of energetic ions on plasma damage of SiCOH low-k materialJournal article