A new ultra-low K ILD material based on organic-inorganic hybrid resins

Zhong, BenBenZhongMeynen, HermanHermanMeynenIacopi, FrancescaFrancescaIacopiWeidner, KenKenWeidnerMalhouitre, StéphaneStéphaneMalhouitreMoyer, EricEricMoyerBargeron, CoryCoryBargeronSchalk, PaulPaulSchalkPeck, AlanAlanPeckVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7110A new ultra-low K ILD material based on organic-inorganic hybrid resinsProceedings paper