Enabling bottom-up nanoelectronics fabrication by selective sol-gel dielectric-on-dielectric deposition

Redzheb, M.M.RedzhebArmini, SilviaSilviaArmini2022-03-022022-03-0220210921-5107WOS:000596686200011https://imec-publications.be/handle/20.500.12860/39241Enabling bottom-up nanoelectronics fabrication by selective sol-gel dielectric-on-dielectric depositionJournal article10.1016/j.mseb.2020.114808WOS:000596686200011THIN LIQUID-FILMSSELF-ORGANIZATIONMORPHOLOGIESDROPLETSUPPRESSIONEVAPORATIONPATTERNS