Localised strain characterisation in semiconductor structures using electron diffraction contrast imaging

Janssens, KoenraadKoenraadJanssensVan Der Biest, O.O.Van Der BiestVanhellemont, JanJanVanhellemontMaes, HermanHermanMaesHull, R.R.HullBean, J. C.J. C.Bean2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/693Localised strain characterisation in semiconductor structures using electron diffraction contrast imagingJournal article