Heyne, MarkusMarkusHeynede Marneffe, Jean-FrancoisJean-Francoisde MarneffeNuytten, ThomasThomasNuyttenMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardCaymax, MattyMattyCaymaxRadu, IulianaIulianaRaduDelabie, AnneliesAnneliesDelabieNeyts, Erik C.Erik C.NeytsDe Gendt, StefanStefanDe Gendt2021-10-252021-10-252018-032050-7526https://imec-publications.be/handle/20.500.12860/30883The conversion mechanism of amorphous silicon to stoichiometric WS2Journal articlehttp://pubs.rsc.org/en/Content/ArticleLanding/2018/TC/C8TC00760H#!divAbstract