The improvement of subthreshold slope and trans-conductance of P-type bulk Si field-effect-transistors by solid-source doping

Kikuchi, YoshiakiYoshiakiKikuchiChiarella, ThomasThomasChiarellaDe Roest, DavidDavidDe RoestKenis, KarineKarineKenisOng, PatrickPatrickOngHoriguchi, NaotoNaotoHoriguchi2021-10-242021-10-2420170018-9383https://imec-publications.be/handle/20.500.12860/28677The improvement of subthreshold slope and trans-conductance of P-type bulk Si field-effect-transistors by solid-source dopingJournal articlehttp://ieeexplore.ieee.org/document/7907254/