Wellekens, DirkDirkWellekensVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannMeersschaut, JohanJohanMeersschautSwerts, JohanJohanSwertsKittl, JorgeJorgeKittlCacciato, AntonioAntonioCacciatoDebusschere, IngridIngridDebusschereJurczak, GosiaGosiaJurczakVan Houdt, JanJanVan Houdt2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18344Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devicesProceedings paper