Study of oxynitrides with dual beam TOF-SIMS

De Witte, HildeHildeDe WitteConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstGijbels, RenaatRenaatGijbels2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4288Study of oxynitrides with dual beam TOF-SIMSProceedings paper