Milenin, AlexeyAlexeyMileninAthimulam, RajaRajaAthimulamDemand, MarcMarcDemandCoenegrachts, BartBartCoenegrachts2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21144Fluorocarbon-based passivation in STI plasma etchingMeeting abstract