Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS

Hellin Rico, RaquelRaquelHellin RicoDu Bois, BertBertDu BoisCelis, Jean-PierreJean-PierreCelisWitvrouw, AnnAnnWitvrouw2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9011Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMSProceedings paper