A 70nm vertical Si/Si1-xGex heterojunction pMOSFET with reduced DIBL sensitivity for VLSI applications

Verheyen, PeterPeterVerheyenCollaert, NadineNadineCollaertCaymax, MattyMattyCaymaxLoo, RogerRogerLooDe Meyer, KristinKristinDe MeyerVan Rossum, MarcMarcVan Rossum2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4005A 70nm vertical Si/Si1-xGex heterojunction pMOSFET with reduced DIBL sensitivity for VLSI applicationsProceedings paper