Vaglio Pret, AlessandroAlessandroVaglio PretGaridis, KostasKostasGaridisGronheid, RoelRoelGronheidBiafore, JohnJohnBiafore2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19931Stochastic limitations for EUV resist kinetics towards the 16nm nodeProceedings paper