Farrel, LeoLeoFarrelVerdonck, PatrickPatrickVerdonckVan Besien, ElsElsVan BesienCiofi, IvanIvanCiofiBorrello, GianpaoloGianpaoloBorrelloVanstreels, KrisKrisVanstreelsMardani, ShabnamShabnamMardaniBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-1920111533-4880https://imec-publications.be/handle/20.500.12860/18896Influence of varying porogen loads and different UV cures on low-k film characteristicsJournal article