Armini, SilviaSilviaArminiSun, YitingYitingSunLoyo Prado, JanaJanaLoyo PradoBaumans, KimKimBaumansDe Cooman, JohanJohanDe CoomanRedzheb, MuradMuradRedzhebVerdonck, PatrickPatrickVerdonckSwerts, JohanJohanSwertsBaklanov, MikhaïlMikhaïlBaklanovStruyf, HerbertHerbertStruyf2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21982Self-assembled monolayers assisted pore sealing of k 2.0 dielectricsMeeting abstract