Progress in dopant and carrier profiling in GaAs structures

Kinder, RudolfRudolfKinderSrnanek, RudolfRudolfSrnanekSciana, BeataBeataScianaRadziewicz, DamianDamianRadziewiczBrammertz, GuyGuyBrammertzGoossens, JozefienJozefienGoossensClarysse, TrudoTrudoClarysseVincze, AndrejAndrejVincze2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15600Progress in dopant and carrier profiling in GaAs structuresProceedings paper