Thermal desorption spectrometry as a method of analysis for advanced interconnect materials

Carbonell, LaureLaureCarbonellMartin Hoyas, AnaAnaMartin HoyasWhelan, CarolineCarolineWhelanVereecke, GuyGuyVereecke2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10175Thermal desorption spectrometry as a method of analysis for advanced interconnect materialsBook chapter