Hellings, GeertGeertHellingsRosseel, ErikErikRosseelSimoen, EddyEddySimoenRadisic, DunjaDunjaRadisicPetersen, Dirch HjorthDirch HjorthPetersenHansen, OleOleHansenNielsen, Peter FolmerPeter FolmerNielsenZschaetzsch, GerdGerdZschaetzschNazir, AftabAftabNazirClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstHoffmann, Thomas Y.Thomas Y.HoffmannDe Meyer, KristinKristinDe Meyer2021-10-192021-10-1920111099-0062https://imec-publications.be/handle/20.500.12860/19060Ultra shallow arsenic junctions in germanium formed by millisecond laser annealingJournal article