Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators

Pustan, MariusMariusPustanPaquay, StephaneStephanePaquayRochus, VeroniqueVeroniqueRochusGolinval, Jean-ClaudeJean-ClaudeGolinval2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19633Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonatorsProceedings paper