Simoen, EddyEddySimoenHuang, Y.L.Y.L.HuangMa, YueYueMaLauwaert, J.J.LauwaertClauws, P.P.ClauwsRafi, J.M.J.M.RafiUlyashin, A.A.UlyashinClaeys, CorCorClaeys2021-10-182021-10-1820090013-4651https://imec-publications.be/handle/20.500.12860/16232What do we know about hydrogen-iInduced thermal donors in silicon?Journal article