Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling constrast imaging

Schulze, AndreasAndreasSchulzeHan, HanHanHanStrakos, LiborLiborStrakosVystavel, TomasTomasVystavelPorret, ClémentClémentPorretLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31747Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling constrast imagingProceedings paperhttp://ecst.ecsdl.org/content/86/7/387.full.pdf+html