Xu, KaidongKaidongXuLauwers, AnneAnneLauwersVos, RitaRitaVosArcher, L.L.ArcherKraus, HaraldHaraldKrausDemeurisse, CarolineCarolineDemeurisseMertens, SofieSofieMertensMertens, PaulPaulMertensHenry, Sally-AnnSally-AnnHenryGale, G.G.GaleKovacs, FFKovacsDalmer, M.M.DalmerGaulhofer, EEGaulhofer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13239Post salicidation clean: selective removal of un-reacted NiPt towards NiPtSi(Ge)Proceedings paper